Title:
多結晶シリコンロッドの切断方法および切断装置
Document Type and Number:
Japanese Patent JP4807534
Kind Code:
B2
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Inventors:
Naoki Hatakeyama
Yukio Yamaguchi
Kasai Kazunori
Yukio Yamaguchi
Kasai Kazunori
Application Number:
JP2009123802A
Publication Date:
November 02, 2011
Filing Date:
May 22, 2009
Export Citation:
Assignee:
Mitsubishi Materials Corporation
International Classes:
B28D5/02; B24B27/06; H01L21/304
Domestic Patent References:
| JP9019919A | ||||
| JP2279207A |
Attorney, Agent or Firm:
Hiroshi Chiba