Title:
POLYMER COMPOUND, AND COMPOUND
Document Type and Number:
Japanese Patent JP2017020016
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a polymer compound useful for a resist composition, and a compound useful as raw materials for the polymer compound.SOLUTION: A polymer compound has a constitutional unit (a0) represented by general formula (a0), where A" is a C1-5 alkylene group that may have O or S, O or S; Ris a specific lactone-containing cyclic group, a -SO-containing cyclic group or a carbonate-containing cyclic group, Wis a group formed from a polymerizable group-containing group by a polymerization reaction].SELECTED DRAWING: None
Inventors:
UTSUMI YOSHIYUKI
ARAI MASATOSHI
DAZAI NAOHIRO
KOMURO YOSHITAKA
ARAI MASATOSHI
DAZAI NAOHIRO
KOMURO YOSHITAKA
Application Number:
JP2016136413A
Publication Date:
January 26, 2017
Filing Date:
July 08, 2016
Export Citation:
Assignee:
TOKYO OHKA KOGYO CO LTD
International Classes:
C08F220/28; C07D307/33; C07D407/12; C07D411/12; C07D493/18
Domestic Patent References:
| JP2012078510A | 2012-04-19 | |||
| JP2013068914A | 2013-04-18 | |||
| JP2010164712A | 2010-07-29 | |||
| JP2012093733A | 2012-05-17 | |||
| JP2007177016A | 2007-07-12 |
Foreign References:
| US20100178609A1 | 2010-07-15 | |||
| US20120076996A1 | 2012-03-29 | |||
| US20070148594A1 | 2007-06-28 |
Attorney, Agent or Firm:
Sumio Tanai
Masatake Shiga
Matsumoto
Ryu Miyamoto
Masato Iida
Masatake Shiga
Matsumoto
Ryu Miyamoto
Masato Iida
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