Title:
高分子化合物、レジスト材料及びパターン形成方法
Document Type and Number:
Japanese Patent JP4038675
Kind Code:
B2
Inventors:
Yuji Harada
Jun Hatakeyama
Masako Sasako
Masataka Endo
Kishimura Shinji
Jun Hatakeyama
Masako Sasako
Masataka Endo
Kishimura Shinji
Application Number:
JP2003073273A
Publication Date:
January 30, 2008
Filing Date:
March 18, 2003
Export Citation:
Assignee:
Shin-Etsu Chemical Co., Ltd.
Matsushita Electric Industrial Co., Ltd
Matsushita Electric Industrial Co., Ltd
International Classes:
C08F28/02; G03F7/039; C08F10/14; C08F32/08; H01L21/027
Domestic Patent References:
| JP2004002725A |
Attorney, Agent or Firm:
Takashi Kojima
Saori Shigematsu
Katsunari Kobayashi
Saori Shigematsu
Katsunari Kobayashi