Title:
高分子化合物、レジスト材料及びパターン形成方法
Document Type and Number:
Japanese Patent JP4687913
Kind Code:
B2
Inventors:
Jun Hatakeyama
Yuji Harada
Yoshio Kawai
Masako Sasako
Masataka Endo
Kishimura Shinji
Mitsutaka Otani
Satoru Miyazawa
Kentaro Tsutsumi
Kazuhiko Maeda
Yuji Harada
Yoshio Kawai
Masako Sasako
Masataka Endo
Kishimura Shinji
Mitsutaka Otani
Satoru Miyazawa
Kentaro Tsutsumi
Kazuhiko Maeda
Application Number:
JP2007123045A
Publication Date:
May 25, 2011
Filing Date:
May 08, 2007
Export Citation:
Assignee:
Shin-Etsu Chemical Co., Ltd.
Panasonic Corporation
Central Glass Co., Ltd.
Panasonic Corporation
Central Glass Co., Ltd.
International Classes:
C08F220/22; C08F212/14; G03F7/039
Domestic Patent References:
| JP2002214788A | ||||
| JP2002333715A | ||||
| JP2002006501A | ||||
| JP8245515A | ||||
| JP10083079A | ||||
| JP2000128930A | ||||
| JP9043848A |
Attorney, Agent or Firm:
Takashi Kojima