Title:
重合性化合物、高分子化合物及びポジ型レジスト材料並びにこれを用いたパターン形成方法
Document Type and Number:
Japanese Patent JP4302585
Kind Code:
B2
Inventors:
Jun Hatakeyama
Yuji Harada
Yoshio Kawai
Yuji Harada
Yoshio Kawai
Application Number:
JP2004215901A
Publication Date:
July 29, 2009
Filing Date:
July 23, 2004
Export Citation:
Assignee:
Shin-Etsu Chemical Co., Ltd.
International Classes:
C08F220/10; G03F7/039; C07C69/54; C08F216/14; C08F220/22; H01L21/027
Domestic Patent References:
| JP2004155680A |
Attorney, Agent or Firm:
Mikio Yoshimiya