Title:
化学増幅型フォトレジスト用ポリマー及びフォトレジスト組成物
Document Type and Number:
Japanese Patent JP4128417
Kind Code:
B2
Inventors:
Yasushi Arita
Application Number:
JP2002270854A
Publication Date:
July 30, 2008
Filing Date:
September 18, 2002
Export Citation:
Assignee:
Sumitomo Bakelite Co., Ltd.
International Classes:
C08F232/00; G03F7/039; C08F220/18; C08F220/28; C08F222/06; H01L21/027
Domestic Patent References:
| JP2002099087A | ||||
| JP10153864A | ||||
| JP10130340A |
Other References:
JSR Technical Review,2002年,No.109,12-17,平成20年4月7日付け意見書に添付