Title:
POROUS CERAMIC, MEMBER FOR ADSORPTION AND MEMBER FOR POLISHING
Document Type and Number:
Japanese Patent JP2018016530
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a porous ceramic reduced in particle removal generated from the surface.SOLUTION: Provided is a porous ceramic having a porosity of 25-50 vol.%, and having a surface in which the ratio of the normal reflectance to the total reflectance in the wavelength region of 360-740 nm is 0.08 or more. Also provided is a member for adsorption containing the porous ceramic, and, in the porous ceramic, the face provided with the surface is an adsorption face. Also provided is a member for polishing containing the porous ceramic, and in the porous ceramic, a polishing pad is provided on the face provided with the surface.SELECTED DRAWING: Figure 1
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Inventors:
UMAME TAKEO
Application Number:
JP2016150017A
Publication Date:
February 01, 2018
Filing Date:
July 29, 2016
Export Citation:
Assignee:
KYOCERA CORP
International Classes:
C04B38/00; B24B37/20; H01L21/304
Domestic Patent References:
| JP2007223890A | 2007-09-06 | |||
| JP2007171273A | 2007-07-05 | |||
| JPH10128634A | 1998-05-19 | |||
| JP2001158674A | 2001-06-12 |
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