To obtain high precise and accurate measured results timely by closely measuring the position, movement direction, movement speed and acceleration of a movable part through high resolving power.

The device includes a scale part 2 having a coil wire 4 passed through a waveguide tube 3, an exterior magnet part 5 movably disposed along the scale part 2 and joined movable part Mm, and a measurement conducting part 6 for obtaining the position of the movable part Mm by the time from application of pulse electric current to the coil wire 4 wire 4 through receiving of ultrasonic wave vibration at a given position of the wave guide tube 3, which is induced in the waveguide tube 3 at the position of the exterior magnet part 5. In particular, the measurement conducting part 6 is composed of a pulse electric current applicator 7 for applying pulse electric current Ip1... at a period of Ts, an ultrasonic wave vibration receiving part 8 for receiving ultrasonic vibration, a discrimination functioning part for discriminating ultrasonic wave vibration corresponding to each pulse electric current Ip1..., and a signal processing part 10 for obtaining the position of the movable part Mm every period of Ts.