Title:
Position detection device, position detection method, imprint device and article manufacturing method
Document Type and Number:
Japanese Patent JP6341883
Kind Code:
B2
Abstract:
The present invention provides a position detection apparatus including a detection unit configured to detect moire caused by overlap between a first diffraction grating including patterns arrayed in a first direction and a second diffraction grating including patterns arrayed in the first direction, and a processing unit configured to obtain a relative position of the first diffraction grating and the second diffraction grating based on the moire, wherein a width of an end pattern of patterns included in at least one of the first diffraction grating and the second diffraction grating in the first direction is smaller than widths of remaining patterns of the at least one diffraction grating in the first direction.
Inventors:
Koji Sato
Application Number:
JP2015116883A
Publication Date:
June 13, 2018
Filing Date:
June 09, 2015
Export Citation:
Assignee:
Canon Inc
International Classes:
H01L21/027; B29C59/02; G01B11/00; G01D5/26; G03F9/00
Domestic Patent References:
| JP2013030757A | ||||
| JP2007142419A | ||||
| JP2013514638A | ||||
| JP2004103697A | ||||
| JP9152309A | ||||
| JP8321452A | ||||
| JP2009302534A |
Foreign References:
| US20120328725 | ||||
| US20120244319 |
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
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