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Title:
位置検出素子およびにこれを用いた位置検出装置
Document Type and Number:
Japanese Patent JP7104068
Kind Code:
B2
Abstract:
A position detection element includes an exchange coupling film having a large exchange coupling magnetic field and a position detection apparatus showing good detection accuracy in a high temperature environment. The position detection element includes an exchange coupling film composed of a fixed magnetic layer and an antiferromagnetic layer stacked on the fixed magnetic layer. The antiferromagnetic layer includes an X(Cr—Mn) layer containing X that is one or more elements selected from the group consisting of platinum group metals and Ni and containing Mn and Cr. The X(Cr—Mn) layer includes a PtMn layer as a first region relatively closer to the fixed magnetic layer and a PtCr layer as a second region relatively farther from the fixed magnetic layer. The content of Mn in the first region is higher than the content of Mn in the second region.

Inventors:
Masamichi Saito
Fumito Koike
Application Number:
JP2019561582A
Publication Date:
July 20, 2022
Filing Date:
December 19, 2018
Export Citation:
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Assignee:
Alps Alpine Co., Ltd.
International Classes:
H01L43/08; G01D5/245; G01R33/02; G01R33/06; H01F10/12; H01L43/10; H01L43/12
Domestic Patent References:
JP2002303536A
JP2003338644A
Attorney, Agent or Firm:
Katsuyuki Okubo
Field Saki Teruo
Masahiro Matsushita