Title:
POSITION DETECTOR
Document Type and Number:
Japanese Patent JPS646807
Kind Code:
A
Abstract:
PURPOSE:To decrease the number of components and to simplify the constitution of a device by using a light source generation part, luminous flux, and a photodetection part in common for (x)- and (y)-directional position detecting operations. CONSTITUTION:Three light emission parts of a light source which are arranged as specified project pieces of (z)-directional luminous flux A-C with the same intensity on a photodetector, and they pass through a filter 28 respectively and are incident on three photodetection parts of the photodetector 26. For the purpose, the quantities of light detected by those three photodetection parts are denoted as A-C and A-B is calculated from those detected quantities of light to detect the (x)-directional position of an objective immediately. Further, C-A is also calculated to detect the (y)-directional position of the objective 10 immediately.
Inventors:
TOGAWA MASAYUKI
Application Number:
JP16258687A
Publication Date:
January 11, 1989
Filing Date:
June 30, 1987
Export Citation:
Assignee:
CANON DENSHI KK
International Classes:
G01B11/00; G11B7/085; G11B7/09; (IPC1-7): G01B11/00; G11B7/085; G11B7/09
Attorney, Agent or Firm:
Yamashita
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