Title:
POSITION SENSITIVITY DETECTOR
Document Type and Number:
Japanese Patent JPH03165208
Kind Code:
A
Abstract:
PURPOSE:To detect a minor components excellently by cutting a signal which has a large peak locally by an extremely small movable shutter as to a detector used for the mass spectrum detector of a mass spectrometer. CONSTITUTION:The mass spectrometer 1 divides an incident ion 1 into ions M1, Mx, and M2 which differ in mass/charge ration with a magnetic field 2 and they are converged on an output plane. Electrons multiplied by a microchannel plate 3 which is arranged on the converged plane are made incident on a continuous resistance film 4 of RAE and converted into an electric signal. The extremely small movable shutter 8 is provided between the microchannel plate 3 and the continuous resistance film 4 of RAE and moved to the position of a maximum incidence peak to cut off corresponding electrons which are incident on the continuous resistance film 4. Consequently, even the detector which has a small dynamic range can detect a minor components such as impurities.
Inventors:
MOGAMI AKINORI
Application Number:
JP30594489A
Publication Date:
July 17, 1991
Filing Date:
November 24, 1989
Export Citation:
Assignee:
JEOL LTD
International Classes:
G01B15/00; G01N27/62; H01J49/28; H01J49/46; (IPC1-7): G01B15/00; G01N27/62; H01J49/28; H01J49/46
Attorney, Agent or Firm:
Hiroshi Nirazawa (6 others)