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Title:
POSITIONING APPARATUS, EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2014064025
Kind Code:
A
Abstract:

To prevent deterioration of positioning accuracy due to fluctuation in the dimension of a gap between an electromagnet and a sucking target.

A positioning apparatus constituted so as to control relative positions of a first component and a second component comprises: an electromagnet fixed to the first component; a sucking target fixed to the second component so as to be sucked by the electromagnet; a magnetic flux sensor for detecting a magnetic flux value generated by the electromagnet; and a drive part for driving the electromagnet according to a deviation between a corrected magnetic flux command value obtained by correction of a magnetic flux command value according to the dimension of a gap between the electromagnet and the sucking target and the magnetic flux value detected by the magnetic flux sensor.


Inventors:
ASANO TOSHIYA
Application Number:
JP2013238257A
Publication Date:
April 10, 2014
Filing Date:
November 18, 2013
Export Citation:
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Assignee:
CANON KK
International Classes:
H01L21/027; H01L21/68
Domestic Patent References:
JP2004334790A2004-11-25
JP2001107961A2001-04-17
JP2006147919A2006-06-08
JP2003218188A2003-07-31
JP2003509003A2003-03-04
JP2008153546A2008-07-03
Foreign References:
US20080143995A12008-06-19
US20050017831A12005-01-27
US20060119190A12006-06-08
US20030179359A12003-09-25
US20050140955A12005-06-30
US6069417A2000-05-30
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu



 
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