Title:
位置決め装置および露光装置
Document Type and Number:
Japanese Patent JP4383626
Kind Code:
B2
Abstract:
A pipe structure includes a double pipe having a resin inner pipe and a resin outer pipe covering an outside of the inner pipe, and a discharge mechanism for discharging fluid in a space between the inner pipe and the outer pipe. The double pipe is used in a vacuum chamber having a vacuum atmosphere.
Inventors:
Takenori Emoto
Application Number:
JP2000112216A
Publication Date:
December 16, 2009
Filing Date:
April 13, 2000
Export Citation:
Assignee:
Canon Inc
International Classes:
G12B5/00; H01L21/027; F16L9/18; F16L9/19; G03F7/20; H01J37/18; H01J37/20; H01J37/305; H01L21/00; H01L21/02
Domestic Patent References:
| JP5198490A | ||||
| JP10233433A | ||||
| JP2001267227A | ||||
| JP2001189374A | ||||
| JP63098413A |
Attorney, Agent or Firm:
Keizo Nishiyama
Yuichi Uchio
Yuichi Uchio