Title:
位置決め装置および露光装置
Document Type and Number:
Japanese Patent JP7190298
Kind Code:
B2
Abstract:
To provide an advantageous technique for providing high reproducibility and high rigidity in a fixing operation.SOLUTION: A positioning device includes: a first member having a first surface parallel to a first direction; a first rail and a second rail fixed to the first member so as to be separated from each other in a second direction intersecting the first direction and arranged parallel to the first direction; A first block and a second block which are supported by the first rail and can move along the first rail; a third block which is supported by the second rail and can move along the second rail; a second member which has a second surface facing the first surface and is fixed to the first block, the second block, and the third block; and a fastening section for fastening the first member and the second member to each other so that the first surface and the second surface come into contact with each other. The first member and the second member are rigid members.SELECTED DRAWING: Figure 1
Inventors:
Atsushi Endo
Yugo Shibata
Naoto Fuse
Yugo Shibata
Naoto Fuse
Application Number:
JP2018174192A
Publication Date:
December 15, 2022
Filing Date:
September 18, 2018
Export Citation:
Assignee:
Canon Inc
International Classes:
G02B7/00; G03F7/20
Domestic Patent References:
| JP2011220516A | ||||
| JP2005016719A | ||||
| JP7164252A | ||||
| JP2014134646A | ||||
| JP10009262A |
Attorney, Agent or Firm:
Patent Attorney Corporation Otsuka International Patent Office