Title:
POSITIONING DEVICE FOR OBJECT TO BE INSPECTED
Document Type and Number:
Japanese Patent JP3643733
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To prevent a slight moving part from moving by mounting a sucking member for sucking a surface plate on a moving part, fixing the moving part with the sucking member on the surface plate in a position where the moving part is moved a prescribed distance with a coarse feed transferring member and thereafter positioning an object to be inspected in the position capable of inspecting with the slight moving part.
SOLUTION: A moving part 42 is surely fixed to a surface plate 41 via the sucking plate 49 vacuum sucked on the surface plate 41. Therefore, when a slight moving part 53 is slightly moved on the moving part 42 fixed onto the surface plate 41 and the position of a scanning zone of a magnetic head is adjusted, corrected adjusting is executed even when the slight moving part 53 is necessitated to slightly move at a unit of e.g. 0.1 μm. Also, the moving part 42 is surely fixed even when a system wherein the moving part 42 is moved by the rotation of a feed screw 46 combined to a motor 44 is adopted as the moving system (coarse feed transferring means) of the moving part 42.
Inventors:
Makoto Watanabe
Application Number:
JP22647699A
Publication Date:
April 27, 2005
Filing Date:
August 10, 1999
Export Citation:
Assignee:
ALPS ELECTRIC CO.,LTD.
International Classes:
G11B5/455; G11B21/02; G11B21/10; (IPC1-7): G11B21/02; G11B5/455; G11B21/10
Domestic Patent References:
| JP1174708U | ||||
| JP11007319A | ||||
| JP6020917A | ||||
| JP5028674A | ||||
| JP3283168A | ||||
| JP2000003549A |
Attorney, Agent or Firm:
野▲崎▼ 照夫