Title:
POSITIONING DEVICE AND PLANOGRAPHIC PRINTING PROJECTION DEVICE CONSTITUTED BY INCLUDING THE SAME
Document Type and Number:
Japanese Patent JP3971868
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To realize high-accuracy positioning by preventing positioning accuracy from being deteriorated because mechanical vibration is transmitted from the 1st part to the 2nd part of a positioning device constituted by including the 1st part and the 2nd part which can be moved by a Lorentz force motor system with respect to the 1st part.
SOLUTION: In this positioning device; the 2nd part 65 is supported in a direction Z by at least one gas cylinder 97 with respect to the 1st part. The cylinder 97 is constituted by including a housing 99 having a pressure chamber 103 and coupled with the 1st part, and a piston 101 coupled with the 2nd part 65, capable of moving in the direction Z in the chamber 103 and born through a bearing with respect to the housing 99 in a direction substantially perpendicular to the direction Z.
Inventors:
Erik Roelov, Ropestra
Adrianis Geraldus, Bower
Henrix Wilhelms Aloysius, Janssen
Harmen Klaas, van der short
Adrianis Geraldus, Bower
Henrix Wilhelms Aloysius, Janssen
Harmen Klaas, van der short
Application Number:
JP20205199A
Publication Date:
September 05, 2007
Filing Date:
July 15, 1999
Export Citation:
Assignee:
AS M Netherlands B.V.
International Classes:
G03F9/00; H01L21/027; G03F7/20; G12B5/00; (IPC1-7): G03F9/00; G12B5/00
Domestic Patent References:
| JP7111238A | ||||
| JP2009550A | ||||
| JP2035709A | ||||
| JP9312255A | ||||
| JP8330224A |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Shinji Oga
Toshifumi Onuki
Hideto Asamura
Hajime Asamura
Yukio Iwamoto
Toru Mori
Shinji Oga
Toshifumi Onuki
Hideto Asamura
Hajime Asamura
Yukio Iwamoto
Toru Mori