Title:
被搬送物の位置決め装置及び位置決め方法
Document Type and Number:
Japanese Patent JP7205047
Kind Code:
B2
Abstract:
To provide a positioning apparatus and a positioning method for a transported object capable of reliably positioning the transported object.SOLUTION: A positioning apparatus 18 according to the present invention includes a taper pin 46 in which an engagement groove 72 opened to the positioning pin 42 side of a table 16 is formed, a vacuum pad 48 surrounding the taper pin 46, and an air conduit 50 that opens to the inner surface of the engagement groove 72 and applies negative pressure to the inside of the vacuum pad 48.SELECTED DRAWING: Figure 4
Inventors:
Yusuke Kaneshiro
Application Number:
JP2019014491A
Publication Date:
January 17, 2023
Filing Date:
January 30, 2019
Export Citation:
Assignee:
Tokyo Seimitsu Co., Ltd.
International Classes:
H01L21/301; B23Q3/18; B23Q11/00; B24B45/00; H01L21/68
Domestic Patent References:
| JP201812189A | ||||
| JP11170189A | ||||
| JP755427B2 | ||||
| JP2009170797A | ||||
| JP201099733A | ||||
| JP9234657A | ||||
| JP2007105829A | ||||
| JP201832747A | ||||
| JP2004165643A | ||||
| JP2006212718A |
Attorney, Agent or Firm:
Kenzo Matsuura
Kazuki Ohara
Kiyoshi Matsumura
Constitutional Matsuura
Kazuki Ohara
Kiyoshi Matsumura
Constitutional Matsuura