To provide a positioning device applicable to machining devices in which the outside of a stage is not easily depressurized, and miniaturizable, by depressurizing the length measuring optical path of an interferometer to improve the positioning accuracy without using a bar mirror.
The base 1 which is a fixed part of this positioning device, has a Y-guide surface. A Y-slider 3 including a Y-recessed space part 6, a seal part 7, and a Y-bearing 8, moves along the Y-guide surface 2. An X-slider including an X-recessed space part 9, a seal part 10, and an X-bearing 11 moves on the Y-slider 3 along the X-guide surface 4. An interferometer 25a and mirrors 27a, 27b are disposed in the X-recessed space part 9 of the X-slider 5. An interferometer 25b and mirrors 27c, 27d are disposed in the Y-recessed space part 6 of the Y-slider 3. The recessed space parts 6, 9 are depressurized by exhaust hoses 15, 16, respectively.
COPYRIGHT: (C)2010,JPO&INPIT
JPH05256611A | 1993-10-05 | |||
JPH08166215A | 1996-06-25 | |||
JP2007203457A | 2007-08-16 | |||
JP2001272488A | 2001-10-05 | |||
JPH06254748A | 1994-09-13 | |||
JPH05256611A | 1993-10-05 | |||
JPH08166215A | 1996-06-25 | |||
JP2007203457A | 2007-08-16 | |||
JP2001272488A | 2001-10-05 |
Yoshiro Sakamoto