Title:
位置決め装置
Document Type and Number:
Japanese Patent JP5587040
Kind Code:
B2
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Inventors:
Naoki Takizawa
Application Number:
JP2010127696A
Publication Date:
September 10, 2014
Filing Date:
June 03, 2010
Export Citation:
Assignee:
Canon, Inc.
International Classes:
B23Q16/02; B23Q1/48; B23Q15/013; B23Q15/26; B23Q17/00; G05B19/18; G05B19/404
Attorney, Agent or Firm:
近島 One husband
Takashi Ota
Takashi Ota