Title:
POSITIONING DEVICE
Document Type and Number:
Japanese Patent JPH02232705
Kind Code:
A
Abstract:
PURPOSE:To precisely position a moving table by statically supporting the moving table by the pneumatic pressure and detecting the oscillation of the table to adjust the supply pressure to a static pressure supporting mechanism. CONSTITUTION:When power is supplied to a rotation driving mechanism 13 of a frictional driving mechanism 102, a revolving shaft 6 pivotally supported by ball bearings 5a to 5c is rotated. Meanwhile, a driving rod 104 is pushed up by the air pressure supplied to a pressure chamber 18 and is pressed to the revolving shaft 6 and a supporting shaft 14. Consequently, the driving rod 104 is moved in the tangential direction of the revolving shaft 6 in accordance with rotation of the revolving shaft 6, and the rotation is transmitted to the moving table 105 through a connecting member 106. An acceleration pickup 120 detects the oscillation of the moving table 105 at the time of positioning control to send the detection signal to a control part 118. The control part 118 adjusts a second servo valve 112 to control the suction air pressure to the static pressure supporting mechanisms 103. Thus, the moving table 105 is positioned in the nm order.
Inventors:
SAKUTA SHIGERU
Application Number:
JP5460289A
Publication Date:
September 14, 1990
Filing Date:
March 07, 1989
Export Citation:
Assignee:
TOSHIBA CORP
International Classes:
G05D3/12; (IPC1-7): G05D3/12
Attorney, Agent or Firm:
Takehiko Suzue (3 outside)