To provide a positioning method and a positioning system that can perform the positioning at a low cost and in high precision by paying attention to the positional reproducibility of an XY stage.
When a XY stage 1 is driven and is positioned at an aimed point by the command value of NC data outputted from an NC controller, all lattice points 3a of a reference master 3 previously provided at the XY sage are detected by a microscope and are recognized by a position recognition device 13. This actual measured lattice point coordinates and basic lattice point coordinates on NC data corresponding to the actual measured lattice point coordinates are memorized by a lattice point table 14. When the XY stage is moved to a target point, an amount of compensation is calculated from the deviation of four target points on the actual measured lattice point coordinates taken out from the lattice point table 14 and four target points on the basic lattice point coordinates, and the command value of the NC data is corrected.
KIMURA SATORU
NAKAI IZURU
KASAI KENJI
FURUKAWA TAKAYUKI
