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Patent Searching and Data


Title:
POSITIONING TABLE APPARATUS
Document Type and Number:
Japanese Patent JP2003345445
Kind Code:
A
Abstract:

To provide an inexpensive and highly reliable positioning apparatus for initializing a table even when any changeover sensor (field detector) different from a sensor for controlling positioning is excluded, concerning a positioning table apparatus comprising: a position detector for detecting the position of the table; a multi-phase motor; and a magnet preloaded hydrostatic bearing.

The apparatus comprises: the position detector for detecting the position of the table; the multi-phase motor for selectively changing-over a coil to be energized in response to the position of the table; an initialization driving current command setting part; a table speed arithmetic part, and a divider. The divider divides a signal from the initialization driving current command setting part by a signal from the table speed arithmetic part, adopts the arithmetic result as a command, and, then, drives a stage to the position of an original point switch.


Inventors:
OISHI SHINJI
Application Number:
JP2002147792A
Publication Date:
December 05, 2003
Filing Date:
May 22, 2002
Export Citation:
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Assignee:
CANON KK
International Classes:
B23Q15/00; B23Q1/00; B23Q1/58; B23Q5/28; B23Q17/22; G05B19/19; G05D3/12; (IPC1-7): G05D3/12; B23Q1/58; B23Q5/28; B23Q17/22; G05B19/19
Attorney, Agent or Firm:
Yasunori Otsuka (3 others)