Title:
POSITIVE AND NEGATIVE CUSP TYPE ION SOURCE
Document Type and Number:
Japanese Patent JPH06176726
Kind Code:
A
Abstract:
PURPOSE: To obtain the ion of every kinds of atom from one ion source easily at a high intensity.
CONSTITUTION: A positive variable direct current power source 14 is used to draw not only the metal negative ion but also the metal positive ion. Then, even in the case of an atom, of which electron affinity is too small to obtain the beam at a high intensity as a negative ion, an ion beam 10 at a high intensity can be obtained by drawing as the positive ion. Ion of every kind of atom can be obtained from one ion source easily at a high intensity.
Inventors:
MORI YOSHIHARU
TAKAGI AKIRA
KAKIGI MUTSUO
KOBAYASHI HITOSHI
YAMASU KAZUE
TAKAGI AKIRA
KAKIGI MUTSUO
KOBAYASHI HITOSHI
YAMASU KAZUE
Application Number:
JP32652692A
Publication Date:
June 24, 1994
Filing Date:
December 07, 1992
Export Citation:
Assignee:
MITSUBISHI HEAVY IND LTD
KOUENERUGII BUTSURIGAKU KENKYU
KOUENERUGII BUTSURIGAKU KENKYU
International Classes:
H01J27/14; H01J37/08; (IPC1-7): H01J37/08; H01J27/14
Attorney, Agent or Firm:
Toshiro Mitsuishi (1 person outside)
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