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Patent Searching and Data


Title:
POSITIVE PHOTORESIST COMPOSITION FOR EXPOSURE WITH FAR ULTRAVIOLET
Document Type and Number:
Japanese Patent JP2008299351
Kind Code:
A
Abstract:

To provide a positive photoresist composition having superior sensitivity in the resolution of contact holes in the production of a semiconductor device, the photoresist composition preventing the occurrence of particles in the dissolution of solid components in a solvent or during storage with time and also preventing a variation of sensitivity due to storage with time.

The positive photoresist composition for exposure with far ultraviolet contains: a compound which generates an acid when irradiated with active rays or radiation; a resin having a specified structure and a velocity of dissolution in an alkali developing solution increased by the action of the acid; and a specified mixed solvent.


Inventors:
SATO KENICHIRO
Application Number:
JP2008214510A
Publication Date:
December 11, 2008
Filing Date:
August 22, 2008
Export Citation:
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Assignee:
FUJIFILM CORP
International Classes:
G03F7/039; C08F220/00; C08F222/00; C08F232/00; C08F232/04; C08K5/00; C08L33/00; C08L35/00; C08L45/00; G03F7/004; G03F7/033; H01L21/027
Attorney, Agent or Firm:
Takeshi Takamatsu
Kiyozumi Yazawa