Title:
ポジ型フォトレジスト組成物
Document Type and Number:
Japanese Patent JP4116235
Kind Code:
B2
Inventors:
Kenichiro Sato
Application Number:
JP2000290654A
Publication Date:
July 09, 2008
Filing Date:
September 25, 2000
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
G03F7/039; C08F220/18; C08F222/40; C08F232/00; C08K5/00; C08L45/00; G03F7/004; H01L21/027
Domestic Patent References:
| JP2002062657A | ||||
| JP2002082438A | ||||
| JP2002072484A | ||||
| JP2002161116A | ||||
| JP2002012631A | ||||
| JP2002296783A | ||||
| JP2002023371A | ||||
| JP2001209180A | ||||
| JP2001147531A |
Attorney, Agent or Firm:
Takeshi Takamatsu
Kiyozumi Yazawa
Kiyozumi Yazawa