Title:
ポジ型感光性組成物
Document Type and Number:
Japanese Patent JP4025076
Kind Code:
B2
Inventors:
Moto Nakao
Kunihiko Kodama
Kunihiko Kodama
Application Number:
JP2002003900A
Publication Date:
December 19, 2007
Filing Date:
January 10, 2002
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
G03F7/004; C08F32/08; G03F7/039; H01L21/027
Domestic Patent References:
| JP2000241965A |
Attorney, Agent or Firm:
Shohei Oguri
Hironori Honda
Toshimitsu Ichikawa
Takeshi Takamatsu
Kiyozumi Yazawa
Hironori Honda
Toshimitsu Ichikawa
Takeshi Takamatsu
Kiyozumi Yazawa