Title:
ポジ型感光性組成物
Document Type and Number:
Japanese Patent JP6758897
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a positive photosensitive composition which is excellent in sensitivity and process margin and is capable of giving a highly reliable cured film.SOLUTION: The positive photosensitive composition contains (A) a polysiloxane compound whose alkali solubility increases by the action of an acid, (B) a photoacid generator, and (C) a basic compound having a molecular weight of 220 or more and has sensitivity in a specific range. The photoacid generator (B) and the basic compound (C) are contained at a specific weight ratio.SELECTED DRAWING: None
Inventors:
Hiroshi Inari
Norikatsu Ichiyanagi
Masahito Ide
Manabe Takao
Norikatsu Ichiyanagi
Masahito Ide
Manabe Takao
Application Number:
JP2016089393A
Publication Date:
September 23, 2020
Filing Date:
April 27, 2016
Export Citation:
Assignee:
Kaneka Corporation
International Classes:
G03F7/039; G03F7/004; G03F7/075; G03F7/20; H01L51/50; H05B33/04; H05B33/22
Domestic Patent References:
| JP2006145853A |
Foreign References:
| WO2016052389A1 | ||||
| WO2014007231A1 |
Attorney, Agent or Firm:
Harakenzo world patent & trademark