Title:
POSITIVE PHOTOSENSITIVE RESIN COMPOSITION, PROTECTIVE FILM, INTERLAYER INSULATING FILM, AND SEMICONDUCTOR DEVICE AND DISPLAY ELEMENT USING THEM
Document Type and Number:
Japanese Patent JP2008052079
Kind Code:
A
Abstract:
To provide a positive photosensitive resin composition having high sensitivity, high resolution and high residual film ratio.
The positive photosensitive resin composition comprises an alkali-soluble resin (A) and a naphthoquinone-diazidosulfonic ester compound of phenol (B) represented by Formula (1), wherein R1 is a 1-15C alkylene or substituted alkylene group or a 2-15C alkenylene or substituted alkenylene group; R2-R5 are each H, halogen, an alkyl or substituted alkyl group, a cycloalkyl or substituted cycloalkyl group, an aryl or substituted aryl group, a 1-5C alkoxy group, a 1-5C acyl group or a 1-5C ester group, and R2-R5 may be the same or different.
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Inventors:
MAKABE HIROAKI
Application Number:
JP2006228802A
Publication Date:
March 06, 2008
Filing Date:
August 25, 2006
Export Citation:
Assignee:
SUMITOMO BAKELITE CO
International Classes:
G03F7/022; C08G73/10; C08G73/14; C08G73/22; G03F7/023; H01L21/027
Domestic Patent References:
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JP2006162791A | 2006-06-22 | |||
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