Title:
ポジ型感光性樹脂組成物
Document Type and Number:
Japanese Patent JP4514542
Kind Code:
B2
Inventors:
Yasuhiro Kataoka
Motohiro Niwa
Motohiro Niwa
Application Number:
JP2004224227A
Publication Date:
July 28, 2010
Filing Date:
July 30, 2004
Export Citation:
Assignee:
Asahi Kasei E-materials Co., Ltd.
International Classes:
G03F7/022; C08F290/06; G03F7/004; G03F7/40; H01L21/027
Domestic Patent References:
| JP11349810A | ||||
| JP2000221677A |
Foreign References:
| WO2005068535A1 |
Attorney, Agent or Firm:
Yoshio Narui
Hideo Takei
Yoshiaki Matsui
Hideo Takei
Yoshiaki Matsui