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Title:
ポジ型レジスト組成物及びそれを用いたパターン形成方法
Document Type and Number:
Japanese Patent JP5175579
Kind Code:
B2
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Inventors:
Hiroshi Saegusa
Application Number:
JP2008043412A
Publication Date:
April 03, 2013
Filing Date:
February 25, 2008
Export Citation:
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Assignee:
FUJIFILM Corporation
International Classes:
G03F7/004; G03F7/039
Domestic Patent References:
JP2001133980A
JP2002363148A
JP2002363123A
JP2001166476A
Foreign References:
WO2009074522A1
Attorney, Agent or Firm:
Takeshi Takamatsu
Toshiyuki Ozawa
Hasegawa Hiromichi



 
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