Title:
ポジ型レジスト組成物
Document Type and Number:
Japanese Patent JP3615273
Kind Code:
B2
Inventors:
Kazuhito Sato
Kazuyuki Nitta
Akiyoshi Yamazaki
Sakai Yohichi
Toshimasa Nakayama
Kazuyuki Nitta
Akiyoshi Yamazaki
Sakai Yohichi
Toshimasa Nakayama
Application Number:
JP19102095A
Publication Date:
February 02, 2005
Filing Date:
July 05, 1995
Export Citation:
Assignee:
Tokyo Ohka Kogyo Co., Ltd.
International Classes:
G03F7/004; C08F12/22; C08F212/00; C08G2/00; C08L25/00; C08L25/18; G03F7/039; H01L21/027; (IPC1-7): G03F7/039; C08F12/22; C08G2/00; C08L25/18; G03F7/004; H01L21/027
Domestic Patent References:
| JP3290565B2 | ||||
| JP2960661B2 | ||||
| JP7092679A | ||||
| JP7092663A | ||||
| JP5181279A | ||||
| JP2004070366A |
Attorney, Agent or Firm:
Heihachi Hattori