ポジ型レジスト組成物 - FUJIFILM Corporation

Title:

ポジ型レジスト組成物

Document Type and Number:

Japanese Patent JP4049236

Kind Code:

B2

Inventors:

Kenichiro Sato
Kunihiko Kodama
Toshiaki Aoi

Application Number:

JP28576199A

Publication Date:

February 20, 2008

Filing Date:

October 06, 1999

Export Citation:

Assignee:

FUJIFILM Corporation

International Classes:

G03F7/039; H01L21/027; C08F2/06; C08F6/12; C08F20/10; C08K5/3492; C08K5/36; C08L33/04

Domestic Patent References:

Attorney, Agent or Firm:

Takeshi Takamatsu
Kiyozumi Yazawa

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