Title:
ポジ型レジスト組成物
Document Type and Number:
Japanese Patent JP4056318
Kind Code:
B2
Inventors:
Toru Fujimori
Koichi Kawamura
Koichi Kawamura
Application Number:
JP2002219789A
Publication Date:
March 05, 2008
Filing Date:
July 29, 2002
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
G03F7/039; C08F20/18; C08F20/28; C08F32/00; G03F7/004; H01L21/027
Domestic Patent References:
| JP2000309611A | ||||
| JP7028245A | ||||
| JP2003057827A | ||||
| JP1010737A | ||||
| JP200366596A |
Attorney, Agent or Firm:
Takeshi Takamatsu
Kiyozumi Yazawa
Kiyozumi Yazawa