Title:
ポジ型レジスト組成物
Document Type and Number:
Japanese Patent JP4056345
Kind Code:
B2
Inventors:
Kazuyoshi Mizutani
Tomoya Sasaki
Shinichi Kanna
Tomoya Sasaki
Shinichi Kanna
Application Number:
JP2002285486A
Publication Date:
March 05, 2008
Filing Date:
September 30, 2002
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
G03F7/039; C08F32/04; H01L21/027
Domestic Patent References:
| JP2002179624A | ||||
| JP2002196495A | ||||
| JP2002169287A | ||||
| JP2002234916A | ||||
| JP2001328964A |
Foreign References:
| WO2002073316A1 |
Attorney, Agent or Firm:
Takeshi Takamatsu
Kiyozumi Yazawa
Kiyozumi Yazawa