ポジ型レジスト組成物 - FUJIFILM Corporation

Title:

ポジ型レジスト組成物

Document Type and Number:

Japanese Patent JP4073255

Kind Code:

B2

Inventors:

Tomoya Sasaki
Kazuyoshi Mizutani
Shinichi Kanna

Application Number:

JP2002161617A

Publication Date:

April 09, 2008

Filing Date:

June 03, 2002

Export Citation:

Assignee:

FUJIFILM Corporation

International Classes:

G03F7/039; C08F12/22; C08F20/26; C08F20/58; C08F32/08; H01L21/027

Foreign References:

Attorney, Agent or Firm:

Takeshi Takamatsu
Kiyozumi Yazawa

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