Title:
ポジ型レジスト組成物
Document Type and Number:
Japanese Patent JP4090773
Kind Code:
B2
Inventors:
Kenichiro Sato
Kazuya Uenishi
Kazuya Uenishi
Application Number:
JP2002101333A
Publication Date:
May 28, 2008
Filing Date:
April 03, 2002
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
G03F7/039; C08F220/18; H01L21/027
Domestic Patent References:
| JP2000047386A | ||||
| JP2000010287A | ||||
| JP2002241442A | ||||
| JP2001131232A | ||||
| JP2001022072A | ||||
| JP2000136165A |
Attorney, Agent or Firm:
Takeshi Takamatsu
Kiyozumi Yazawa
Kiyozumi Yazawa