Title:
ポジ型レジスト組成物
Document Type and Number:
Japanese Patent JP4137406
Kind Code:
B2
Inventors:
Kenichiro Sato
Application Number:
JP2001149861A
Publication Date:
August 20, 2008
Filing Date:
May 18, 2001
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
G03F7/039; C08F20/28; C08F22/06; C08F22/40; C08F32/00; H01L21/027
Domestic Patent References:
| JP2000347409A | ||||
| JP2000136165A | ||||
| JP2001048931A | ||||
| JP2002023372A |
Attorney, Agent or Firm:
Takeshi Takamatsu
Kiyozumi Yazawa
Kiyozumi Yazawa