Title:
ポジ型レジスト組成物
Document Type and Number:
Japanese Patent JP4208422
Kind Code:
B2
Inventors:
Kenichiro Sato
Kunihiko Kodama
Kunihiko Kodama
Application Number:
JP2001048880A
Publication Date:
January 14, 2009
Filing Date:
February 23, 2001
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
G03F7/039; C08F20/28; C08F32/04; C08F32/08; C08K5/36; C08L101/06; G03F7/004; H01L21/027
Domestic Patent References:
| JP2000026446A | ||||
| JP2000159758A | ||||
| JP2000292917A | ||||
| JP2002116546A | ||||
| JP2002146333A | ||||
| JP11338152A | ||||
| JP2000010286A | ||||
| JP2000019733A | ||||
| JP2001064273A |
Attorney, Agent or Firm:
Takeshi Takamatsu
Kiyozumi Yazawa
Kiyozumi Yazawa
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