Title:
POSITIVE TYPE DRY FILM PHOTORESIST HAVING HIGH RESOLUTION
Document Type and Number:
Japanese Patent JPH10213903
Kind Code:
A
Abstract:
To enable removal in an aq. caustic alkali soln. and prefect fading by a photoactive component due to light under slight exposure in a photoresist compsn. contg. a UV transparent resin binder and photo-acid generating agent.
A photoresist compsn. contg. a photo-acid generating agent and a resin binder is used. The resin binder is made of cellulose resin having a structure represented by the formula and acid functional groups or consists of the cellulose resin and ≤25wt.% acidic acrylic resin having about -10 to +110°C glass transition temp. In the formula, each of R and R1-R5 is H, 1-6C alkyl, 2-6C hydroxyalkyl, 2-4C alkyl, etc.
Inventors:
KOES THOMAS A
BELTRAMO GRIEG B
BELTRAMO GRIEG B
Application Number:
JP34001297A
Publication Date:
August 11, 1998
Filing Date:
December 10, 1997
Export Citation:
Assignee:
MORTON INT INC
International Classes:
G03F7/004; C08K5/42; C08L1/08; C08L33/00; C09D7/12; C09D101/08; C09D133/00; G03F7/039; (IPC1-7): G03F7/039; C08K5/42; C08L1/08; C09D7/12; C09D101/08; G03F7/004
Attorney, Agent or Firm:
Takashi Ishida (3 others)