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Title:
POSITIVE TYPE PHOTORESIST COMPOSITION
Document Type and Number:
Japanese Patent JP2001147536
Kind Code:
A
Abstract:

To provide a positive type photoresist composition having sufficiently high sensitivity and resolving power in the formation of a contact hole pattern in the production of a semiconductor device, less liable to produce particles in a resist solution and excellent in dependency on density.

The positive type photoresist composition contains (A) an acid generating sulfonium salt compound represented by a specified structure, (B) an acid decomposable resin containing at least specified silicon-containing repeating units or repeating units with a specified structure and having solubility to an alkali developing solution increased by the action of the acid, (C) a solvent, (D) an organic basic compound and (E) a surfactant with a specified structure.


Inventors:
SATO KENICHIRO
MIZUTANI KAZUYOSHI
Application Number:
JP33178599A
Publication Date:
May 29, 2001
Filing Date:
November 22, 1999
Export Citation:
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Assignee:
FUJI PHOTO FILM CO LTD
International Classes:
H01L21/027; C07C381/12; C08F222/02; C08F222/06; C08F222/40; C08F232/08; C08K5/103; C08K5/16; C08K5/36; C08L35/00; C08L45/00; C08L71/02; G03F7/004; G03F7/039; (IPC1-7): G03F7/039; C08F222/02; C08F232/08; C08K5/103; C08L35/00; C08L71/02; G03F7/004; H01L21/027
Attorney, Agent or Firm:
Tadashi Hagino (4 outside)