ポジ型感放射線性樹脂組成物

Title:

ポジ型感放射線性樹脂組成物

Document Type and Number:

Japanese Patent JP4360264

Kind Code:

B2

Abstract:

A positive-tone radiation-sensitive resin composition comprising: (A) a carbazole derivative shown by the following formula (1), (B) a photoacid generator containing a sulfonimide compound and an iodonium salt compound as essential components, and (C) an acid-dissociable group-containing resin which is insoluble or scarcely soluble in alkali, but becomes soluble in alkali when the acid-dissociable group dissociates is disclosed. wherein R¹and R²are individually halogen atom, methyl, cyano, or nitro group, X is a C_1-20organic group, and h and i are 0-4. The resin composition is useful as a chemically amplified positive-tone resist excelling in focal depth allowance, sensitivity, resolution, pattern profile, and PED stability.

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Inventors:

Tomoki Nagai
Takayuki Tsuji

Application Number:

JP2004135912A

Publication Date:

November 11, 2009

Filing Date:

April 30, 2004

Export Citation:

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Assignee:

JSR CORPORATION

International Classes:

G03F7/004; G03C1/492; G03F7/039; G03F7/20; H01L21/027

Domestic Patent References:

JP2002265446A
JP2002162746A
JP2004069857A
JP11072921A

Attorney, Agent or Firm:

Toshiaki Fukuzawa

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