Title:
POST-CURING APPARATUS
Document Type and Number:
Japanese Patent JPH0639849
Kind Code:
A
Abstract:
PURPOSE: To provide a post-curing apparatus capable of performing a preheating process, a final heating process and a cooling process in parallel and directly connected to the mold device of a previous process to make it possible to establish an in-line system.
CONSTITUTION: A preheating chamber 4, a final heating chamber 5 and a cooling chamber 6 are formed so as to be shielded by doors 7a, 7b, 7c, 7d and a feed means allowing a magazine 3 having substrates received therein to be intermittently fed in the respective chambers and fed out of said chambers is provided.
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Inventors:
ECHIGOSHIMA MAKOTO
KIMOTO TAKESHI
KIMOTO TAKESHI
Application Number:
JP20001192A
Publication Date:
February 15, 1994
Filing Date:
July 27, 1992
Export Citation:
Assignee:
NIPPON OXYGEN CO LTD
SHINKU RAITO KK
SHINKU RAITO KK
International Classes:
B29C35/16; H01L21/56; B29L31/34; (IPC1-7): B29C35/16; H01L21/56
Attorney, Agent or Firm:
Kazuhiko Kido (1 person outside)
Next Patent: COOLING APPARATUS