Title:
電力発生システム
Document Type and Number:
Japanese Patent JP4547361
Kind Code:
B2
Abstract:
A power generation system including a RF power generator which provides a RF output power. The power distribution system includes a phase-magnitude detector module having a dual logarithmic amplifier phase-magnitude detector that receives current and voltage signals. The dual logarithmic amplifier phase-magnitude detector generates a phase signal that varies in accordance with the phase between the voltage signal and the current signal, and a magnitude signal that varies in accordance with the magnitude between the voltage and current signals. A controller receives the phase and magnitude signals, and communicates control signals to the matching network.
Inventors:
Richard E. Church, Junior.
Application Number:
JP2006238362A
Publication Date:
September 22, 2010
Filing Date:
September 01, 2006
Export Citation:
Assignee:
MKS INSTRUMENTS,INC.
International Classes:
H03D5/00
Domestic Patent References:
| JP6011528A | ||||
| JP2004128901A | ||||
| JP2003258563A | ||||
| JP2001203539A | ||||
| JP2004085446A | ||||
| JP2003302431A | ||||
| JP2003179045A | ||||
| JP2002329599A |
Attorney, Agent or Firm:
Keiichiro Saikyo