To provide a power source which can be used for any of high voltage and large current, and can rapidly and accurately interrupt arc; a sputtering power source; and a sputtering apparatus.

The power source outputs a direct current power in a forward direction to a load during a steady operation, carries out an arc extinguishing operation of interrupting the output of the direct current power in the forward direction to the load, when the impedance of the load has decreased, and then carries out a restoration operation of restarting the output of the direct current power in the forward direction. The power source is provided with a plurality of power source blocks comprising a first diode for rectifying an alternating current, and an inductor for smoothing the current rectified by the first diode. In the above steady operation, the power source forms the direct current power in the forward direction by connecting the outputs from the plurality of the power source blocks in parallel, and in the restoration operation, forms the direct current power in the forward direction by connecting the outputs from the plurality of the power source blocks in series.