Title:
真空ポンプ用電源装置
Document Type and Number:
Japanese Patent JP6642033
Kind Code:
B2
Inventors:
Shingo Tanaka
Application Number:
JP2016010377A
Publication Date:
February 05, 2020
Filing Date:
January 22, 2016
Export Citation:
Assignee:
SHIMADZU CORPORATION
International Classes:
F04B37/16; H02P29/62; H05K7/20
Domestic Patent References:
| JP10131887A | ||||
| JP2007072292A | ||||
| JP2010193695A | ||||
| JP2014011906A | ||||
| JP9182489A | ||||
| JP2004198005A | ||||
| JP2004116316A | ||||
| JP2014110678A | ||||
| JP2007100629A | ||||
| JP2000199480A |
Attorney, Agent or Firm:
Fuyuki Nagai
Morimoto Takuyuki
Morimoto Takuyuki