Title:
プラグを備える事前圧壊された容量マイクロマシン・トランスデューサセル
Document Type and Number:
Japanese Patent JP5961697
Kind Code:
B2
Abstract:
The present invention relates to a pre-collapsed capacitive micro-machined transducer cell (10) comprising a substrate (12), and a membrane (14) disposed above a total membrane area ((Atotal), wherein a cavity (20) is formed between the membrane (14) and the substrate (12), the membrane (14) comprising a hole (15) and an edge portion (14a) surrounding the hole (15), the edge portion (14a) of the membrane (14) being collapsed to the substrate (12). The cell further comprises a plug (30) arranged in the hole (15) of the membrane (14), the plug (30) being located only in a subarea (Asub) of the total membrane area (Atotal). The present invention further relates to a method of manufacturing such pre-collapsed capacitive micro-machined transducer cell (10).
Inventors:
Dirksen Peter
Deckle ronalto
Henneken Vincent Adriatic
Leeuwenstein Adrien
Merceris bout
Frasel Yong Daufras
Deckle ronalto
Henneken Vincent Adriatic
Leeuwenstein Adrien
Merceris bout
Frasel Yong Daufras
Application Number:
JP2014537759A
Publication Date:
August 02, 2016
Filing Date:
October 15, 2012
Export Citation:
Assignee:
KONINKLIJKE PHILIPS N.V.
International Classes:
H04R19/00; H01L29/84; H04R31/00
Domestic Patent References:
| JP2008245715A |
Foreign References:
| US20100207485 | ||||
| WO2010097729A1 |
Attorney, Agent or Firm:
Susumu Tsugaru
Fueda Shusen
Takahiro Igarashi
Fueda Shusen
Takahiro Igarashi