Title:
PRECISE POSITIONING DEVICE
Document Type and Number:
Japanese Patent JPS56114012
Kind Code:
A
Abstract:
PURPOSE:To obtain a precise positioning device capable of a minute movement, by forming the DC servo system by use of a special linear motor. CONSTITUTION:The magnetic path members 1 forming a number of magnetic fields are arranged in parallel and rectilinearly with same spaces so that the directions of the magnetic paths 2 are set opposite and alternately to each other. Thus a stator 3 is obtained. The driving coil 6 capable of a free movement and consisting of two coils 4 and 5 is installed within the magnetic field to form a linear motor. The stage 14 is provided to the coil 6 and then controlled by the position detector 9 to ensure a precision control of the stage 14 within a minute range of the linear motor. With addition of the memory devices 12 and 13, the current amplifiers 7 and 8 having a variable ratio of magnification, and others, a DC servo system is formed over the entire range of the linear motor. In such way, a precision positioning device can be obtained with a minute movement secured.
Inventors:
IMAHASHI KAZUNARI
Application Number:
JP1628480A
Publication Date:
September 08, 1981
Filing Date:
February 13, 1980
Export Citation:
Assignee:
TERUMETSUKU KK
International Classes:
H01L21/30; G05B19/23; H01L21/027; H02K41/02; H02K41/035; H02P25/06; (IPC1-7): G05D3/12; H01L21/30
Domestic Patent References:
| JPS555012A | 1980-01-14 |