PURPOSE: To precisely cut a thick element by uniformly supplying reaction gas to the bottom of a groove.
CONSTITUTION: A reaction gas supply nozzle 23 is arranged in parallel with a wire electrode W on the electrode W to be fed in a longitudinal direction. The nozzle 23 is formed thinner than a cut groove 24a formed on an element 24 to be cut by radical reaction, and provided at its lower edge with a slitlike injection port. The element 24 to be cut is oscillatorily vibrated together with a support member 25 via a ball screw 65 and a nut 66 by normal and reverse rotations of a motor 64 in a longitudinal direction of the electrode W. The nozzle 23 is introduced into the groove 24a as the cutting is advanced together with the electrode W to supply the gas to the bottom 24b of the groove. A flow of the gas is deflected as the element to be cut is vibrated by the vibration of the element 24 to the nozzle, and the gas is supplied uniformly and effectively to the bottom of the groove. Thus, even if the element 24 to be cut is thick, it can be cut without failure.
ICHIMURA MINORU
NAKAJIMA SHOJI
HASEGAWA HARUTOSHI
FURUYAMA MICHIO
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