Title:
PREPARATION OF ALKYL ARSINE
Document Type and Number:
Japanese Patent JPH01233291
Kind Code:
A
Abstract:
PURPOSE: To easily obtain a high purity alkyl arsine needed for chemical vapor deposition of an organometallic compd. in the production of a semiconductor device by reacting arsine with a specified olefin in contact with an acid catalyst.
CONSTITUTION: Gaseous arsine is reacted with a 3C, preferably 3-12C optionally substd. olefin in contact with an acid catalyst (an org. or inorg. nonoxidizing strong acid, preferably a 1-4C alkanesulfonic acid) in a solvent selected according to the acid catalyst and reactive bodies under pressure and the resultant product is purified by distillation or other method to obtain the objective compd.
Inventors:
DONARUDO BARENTAIN JIYUNIA
Application Number:
JP610089A
Publication Date:
September 19, 1989
Filing Date:
January 17, 1989
Export Citation:
Assignee:
AMERICAN CYANAMID CO
International Classes:
B01J31/02; C07B61/00; C07F9/72; (IPC1-7): B01J31/02; C07B61/00; C07F9/72
Attorney, Agent or Firm:
Heikichi Odashima